The fabrication of microelectromechanical systems uses some of the same processes and tools used to fabricate integrated circuits (e.g., deposition, photolithography, etch). However, MEMS technology ...

The conformality and thickness control achieved by ALD and ALE are very desirable for coating and etching NEMS/MEMS and other nano/micron-sized devices. We are collaborating with Prof. Victor Bright’s ...

The manufacturing of MEMS devices entails three sequential steps: depositing a thin film, patterning the film with a temporary mask, and then etching the film through the mask. This cycle is ...

RIE enables the precise patterning of nanoscale features with high aspect ratios, making it an essential tool in the manufacturing of integrated circuits, MEMS, and photonic devices. Through via hole ...

The micro-electro-mechanical systems (MEMS) design and fabrication process ... followed by deep reactive-ion etching and ...

Fundamental fabrication issues for microscale components used in MEMS/Nanotechnology. Understand and designing microfabrication processes based on photolithography and deposition/etching steps. Micro ...

His research is focused on Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE) and their applications for MEMS devices. Jonas received his B.S. in Chemistry and Physics from Wisconsin ...