Metalenses have been used to image microscopic features of tissue and resolve details smaller than a wavelength of light. Now they are going bigger. Researchers at the Harvard John A. Paulson School ...
Astronomers know the bigger the telescope, the more powerful the imaging capability. To keep the power but streamline one of the bulkier components, a Penn State (PA)-led research team created the ...
In the realm of science and technology, harnessing coherent light sources in the deep ultraviolet (DUV) region holds immense significance across various applications such as lithography, defect ...
A panel representing all aspects of the lithographic ecosystem talked about the future of EUV lithography on February 28th, during the SPIE Advanced Lithography + Patterning conference, in San Jose, ...
M. K. Sears, J. Bekaert, B. W. Smith, "Pupil wavefront manipulation for optical nanolithography", Proc. SPIE 8326, (2012) paper M. K. Sears, G. Fenger, J. Mailfert, B ...
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